JPS5248031B2 - - Google Patents

Info

Publication number
JPS5248031B2
JPS5248031B2 JP49052271A JP5227174A JPS5248031B2 JP S5248031 B2 JPS5248031 B2 JP S5248031B2 JP 49052271 A JP49052271 A JP 49052271A JP 5227174 A JP5227174 A JP 5227174A JP S5248031 B2 JPS5248031 B2 JP S5248031B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49052271A
Other languages
Japanese (ja)
Other versions
JPS50145290A (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49052271A priority Critical patent/JPS5248031B2/ja
Priority to DE2521037A priority patent/DE2521037C3/de
Priority to US05/577,032 priority patent/US4013367A/en
Publication of JPS50145290A publication Critical patent/JPS50145290A/ja
Publication of JPS5248031B2 publication Critical patent/JPS5248031B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B38/00—Methods or devices for measuring, detecting or monitoring specially adapted for metal-rolling mills, e.g. position detection, inspection of the product
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP49052271A 1974-05-13 1974-05-13 Expired JPS5248031B2 (en])

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP49052271A JPS5248031B2 (en]) 1974-05-13 1974-05-13
DE2521037A DE2521037C3 (de) 1974-05-13 1975-05-12 Verfahren und Einrichtung zur Messung und/oder Überwachung der Gleichförmigkeit der Oberfläche eines Werkstückes
US05/577,032 US4013367A (en) 1974-05-13 1975-05-13 Apparatus for detecting irregularities in the surfaces of materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49052271A JPS5248031B2 (en]) 1974-05-13 1974-05-13

Publications (2)

Publication Number Publication Date
JPS50145290A JPS50145290A (en]) 1975-11-21
JPS5248031B2 true JPS5248031B2 (en]) 1977-12-07

Family

ID=12910100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49052271A Expired JPS5248031B2 (en]) 1974-05-13 1974-05-13

Country Status (3)

Country Link
US (1) US4013367A (en])
JP (1) JPS5248031B2 (en])
DE (1) DE2521037C3 (en])

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6011325B2 (ja) * 1977-01-21 1985-03-25 キヤノン株式会社 走査装置
US4166700A (en) * 1977-06-24 1979-09-04 Research Technology, Inc. Film thickness detector
US4260899A (en) * 1979-06-14 1981-04-07 Intec Corporation Wide web laser scanner flaw detection method and apparatus
DE2925734C3 (de) * 1979-06-26 1982-06-24 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Fehlersuchgerät für Materialbahnen
DE3000352C2 (de) * 1980-01-07 1986-07-24 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optoelektronisches Überwachungsgerät
FR2485959B1 (fr) * 1980-06-13 1986-07-18 Centre Rech Metallurgique Procede et dispositif pour controler la planeite des toles metalliques
DE3125189C2 (de) * 1981-06-26 1984-06-14 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Fehlersuchgerät für breite Bahnen
US4570074A (en) * 1982-09-29 1986-02-11 Q-Val Incorporated Flying spot scanner system
JPS59187315A (ja) * 1983-04-08 1984-10-24 Fujitsu Ltd 光走査装置
DE3334357C2 (de) * 1983-09-22 1986-04-10 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Fehlersuchgerät für Bahnen
US4701985A (en) * 1983-12-22 1987-10-27 Leglertex S.R.L. Apparatus for detecting anomalies in corduroy preparation
ATE50644T1 (de) * 1983-12-22 1990-03-15 Leglertex Srl Apparat zum feststellung von fehlern bei der herstellung von kordsamt.
DE3446354A1 (de) * 1984-12-19 1986-06-26 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optoelektronische vergleichsvorrichtung fuer strukturen auf ebenen oberflaechen oder fuer flaechige strukturen
US4643569A (en) * 1985-06-18 1987-02-17 Lincoln Laser Company Dual beam laser inspection apparatus
DE3600578C1 (en) * 1986-01-10 1987-07-30 Schenk Gmbh Industriemesstechn Device for scanning a flat boundary surface of an object
US4879471A (en) * 1987-03-25 1989-11-07 Measurex Corporation Rapid-scanning infrared sensor
DE3741680A1 (de) * 1987-12-09 1989-06-22 Pagendarm Gmbh Verfahren und vorrichtung zum glaetten der oberflaeche einer papierbahn
DE3800543A1 (de) * 1988-01-12 1989-07-20 Feldmuehle Ag Vorrichtung zum pruefen von sich mit hoher geschwindigkeit bewegenden bahnfoermigen flaechengebilden
DE3806385A1 (de) * 1988-02-29 1989-09-07 Feldmuehle Ag Verfahren und vorrichtung zum pruefen von transparenten bahnen
DE3925614A1 (de) * 1989-08-02 1991-02-07 Sick Optik Elektronik Erwin Optische abtastvorrichtung zur fehlersuche an durchlaufenden materialbahnen
US5064259A (en) * 1989-12-05 1991-11-12 Eastman Kodak Company Apparatus for scanning a photo-stimulable phosphor sheet
US5118195A (en) * 1990-09-10 1992-06-02 Rkb Opto-Electrics, Inc. Area scan camera system for detecting streaks and scratches
US6213399B1 (en) * 1991-07-25 2001-04-10 Symbol Technologies, Inc. Multi-channel signal processing in an optical reader
JPH0580497A (ja) * 1991-09-20 1993-04-02 Canon Inc 面状態検査装置
IT1281546B1 (it) * 1995-04-13 1998-02-18 Marposs Spa Apparecchio di misura optoelettronico per il controllo di dimensioni lineari
DE19548036C2 (de) * 1995-12-21 1999-09-09 Wagner Gmbh J Verfahren und Vorrichtung zum zerstörungsfreien Prüfen von Werkstücken
US6170747B1 (en) 1997-08-29 2001-01-09 Jacob P. Meyer Apparatus for inspecting print quality of barcodes on a high speed moving web
US6236454B1 (en) 1997-12-15 2001-05-22 Applied Materials, Inc. Multiple beam scanner for an inspection system
US6208411B1 (en) * 1998-09-28 2001-03-27 Kla-Tencor Corporation Massively parallel inspection and imaging system
US6542304B2 (en) * 1999-05-17 2003-04-01 Toolz, Ltd. Laser beam device with apertured reflective element
US6290135B1 (en) * 1999-07-23 2001-09-18 Psc Scanning, Inc. Multiple source/dense pattern optical scanner
US6636301B1 (en) * 2000-08-10 2003-10-21 Kla-Tencor Corporation Multiple beam inspection apparatus and method
US6879390B1 (en) * 2000-08-10 2005-04-12 Kla-Tencor Technologies Corporation Multiple beam inspection apparatus and method
DE102004039088B4 (de) * 2004-08-12 2010-04-29 Basler Ag Optische Anordnung zum Erzeugen eines zeilen- oder streifenförmigen Linienlichts
DE102007021154A1 (de) * 2007-05-05 2008-11-13 Mahle International Gmbh Prüfeinrichtung
IT1394167B1 (it) * 2009-03-10 2012-05-25 Microtec Srl Metodo per l'individuazione di difetti nel legname.
US8462329B2 (en) * 2010-07-30 2013-06-11 Kla-Tencor Corp. Multi-spot illumination for wafer inspection
US8812149B2 (en) 2011-02-24 2014-08-19 Mss, Inc. Sequential scanning of multiple wavelengths

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2272097A (en) * 1940-02-29 1942-02-03 Westinghouse Electric & Mfg Co Lens assembly for straight line scanning
US3060319A (en) * 1960-12-08 1962-10-23 United Aircraft Corp Optical synchronizer
NL277194A (en]) * 1961-04-14 1900-01-01
US3307968A (en) * 1963-09-03 1967-03-07 Armco Steel Corp Method and apparatus for controlling the alloying of zinc coatings
US3893079A (en) * 1967-03-20 1975-07-01 Cognitronics Corp Character reading apparatus with improved document scanner
US3509349A (en) * 1968-05-21 1970-04-28 Philco Ford Corp Surface finish inspection device utilizing a plurality of light sources
US3618063A (en) * 1970-02-11 1971-11-02 Eastman Kodak Co Defect inspection apparatus

Also Published As

Publication number Publication date
JPS50145290A (en]) 1975-11-21
DE2521037B2 (de) 1977-07-28
US4013367A (en) 1977-03-22
DE2521037A1 (de) 1975-11-27
DE2521037C3 (de) 1978-03-30

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